High Resolution Bi-Telecentric Lenses for Wafer Inspection in Semiconductor

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Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits. Its shape is circular, so it is called wafer. Various circuit element structures can be processed on silicon wafers to become integrated circuit products with specific electrical functions.

In wafer inspection, high-speed inspection is usually required, the resolution requirements are also high, and there are also high requirements for machine vision hardware. The lens needs a large amount of light and the light source needs high brightness.

Solution:

    • Analyze 5um
    • camera: Dalsa 16k 5um
    • Lens: DTCA24K-75-M95-AL
    • light source: Red line light

Inspection targets:

  • Wafer requires high resolution and high demand for light flux
  • Match 16K 5um/ 24k 3.5um camera
  • Analyze 5um
  • High-speed movement, extremely short camera exposure time, high requirements for lens and light source

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